Digital RS485 Gas Thermal Mass Flow Controller and Meter for Semiconductors

• Customization: Available
• After-sales Service: Maintenance & Refund
• Warranty: 1 Year
• Model NO.: HG-MFC Gas Mass Flow Controller
• Accuracy: >±1%
• Main Application: Water, Wastewater, Diesel Fuel, Fuel Oil, Corrosive Liquid/Gas
• Size: 1/4 or 3/8 or 6mm or 10mm
• Sensor: Thread / Flange
• Application: Industrial Production
• Type: Gas Mass Flow Controller
• Measuring Media: Gas
• Measuring Principle: Gas Mass Flow Controller
• Measurement Object: Closed Pipeline
• Certification: JIS, DIN, ANS, GB, CE, RoHS, ISO
• Line Size: 1/4"/ 3/8" / 6mm / 10mm
• Working Temperature: 0-50 Deg.C
• Working Pressure: 3MPa / 10MPa
• Relative Humidity: 5% -95%
• Power Supply: DC 15V / 24V
• Protection Level: IP 65 Gas Mass Flow Controller
• Analog Output: 0-5V / 4-20mA / 0-10V
• Digital Communication: RS485 Modbus RTU
• Display: None / Digital Display
• Electrical Connections: dB15
• Process Connection: Swagelok 6 & Swagelok 8 & VCR 1/4" ....
• Base Material: Ss 316L
• Differential Pressure Requirement: 0.05-1.0MPa
• Flow Rate: 10sccm-200slm & 300slm-3000slm
• Keywords: Gas Thermal Mass Flow Controller
• Transport Package: 2kg
• Specification: 25*15*15cm
• Trademark: Siko Instruments
• Origin: China
• HS Code: 9026100000
• Production Capacity: 999 Units / Weeks
• Package Size: 20.00cm * 20.00cm * 15.00cm
• Package Gross Weight: 2.000kg

Product Description

Digital Rs485 Gas Thermal Mass Flow Controller And Meter For Semiconductors

    01. Mass Flow Meter :  Mass Flow Meter (MFM), a mass series instrument is a direct measurement of gas mass flow using capillary heat sensing technology. No need for temperature and pressure correction. MFM with high precision and widely applicated in different industrial fields. 

   02. Mass Flow Controller:  Mass Flow Controller (MFC), is a analog and digital compatiable mode gas mass flow controller, not only has the function of MFM (Mass Flow Meter) for direct measurement of gas mass flow, but also can automatically control and keep the gas flow at a constant setted value.  MFC can be adjusted by analog or digital display controller or instrument panel, or PLC to set and display instantaneous flow.

Features

01	Direct Measurement Of Gas Mass Flow.
02	Accuracy:  ±1.0% F.S. Repeatability:  ±0.25%F.S.
03.	Linear analogue Output Output 4-20mA, 0-5V, 0-10V etc.
04.	RS-232 Interfaces With PLC Or Workstation.
05.	RS-485 Modbus RTU (Addressable) Can Be Controlled And Displayed By Computer.
06.	No Need For Pressure & Temperature Correction.
07.	Turndown MFM 100:  1,  MFC 50:  1.
08.	Taking Capillary Heat Sensing Technology
09.	Stability And Reliability Optimized For Long-Term Process Control
10.	Applies MultiFlow Technology With Multi Gas And Multi Range Functionality

Product Parameters

Measuring Range & Pressure

Outline Dimension

 

Selection Table

Company Profile